SEM: TESCAN Vega3 SBH
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LocationMSE 309 SEM Fees2-Hour Training: $50 1-Hour Follow-up: $25 Regular Usage: $25/hour |
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LocationMSE 309 Sputter Coater Fees$1.50 per 10 seconds |
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Instrument Specifications
Electron Gun Tungsten heated cathode, 200 V - 30 kV Vacuum High Vacuum Mode: < 9 x 10-3 Pa Resolution High Vacuum Mode (SE): 3 nm at 30 kV, 8 nm at 3 kV Detectors Secondary Electron EDS Analytical System Bruker LN2-free high-resolution, high-speed 30 mm2 SD Detector
Energy resolution ≤ 129 eV at Mn-Kα
Slew window, detection from boron (5) to californium (98)
Stage Eucentric
Standard: 3-axis motorized
X = 45 mm - motorized, Y = 45 mm - motorized, Z = 27 mm manual
Rotation = 360° continuous - motorized, Tilt = -90° to +90° - manual
Magnification 3x - 1,000,000x (for 5" image width in Continual Wide Field/Resolution) Working Modes Resolution, Depth, Field, Wide Field -
EDS Analysis Software
ESPRIT Compact Software (free download)
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Choose to install the Data Station (with dongle) option
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Ignore the error code
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Open the program, and click "System", and "Update"
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Download, and select the following License File
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Restart the program
ESPRIT 2.1 (in MSE 309 only)
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Useful Documentation
UCR SEM training and operators manual UCR MSE SEM Training Notebook rev 3.6 (last updated March 12, 2019) UCR EDS training and operators manual UCR MSE EDS Training Notebook rev 1.0 (last updated October 24, 2018) JEOL SEM guide JEOL SEM Guide ESPRIT Compact operators manual ESPRIT Compact Manual -
SEM Training Videos
- EDS Training Videos
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Access to SEM
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Only trained users are allowed to operate the equipment
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Trained users are NOT ALLOWED to train anyone else on the equipment
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Trained users are NOT ALLOWED to bring in any unauthorized visitors even if the visitors are observing the trained user without prior notification to the lab manager
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All visitors MUST complete the following 4 training modules via UC Learning and inform the lab manager prior to entering the lab as an EH&S requirement
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E-mail or deliver printed copy of your visitor's training transcript to facilities manager (MSE 311)
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Training Request for SEM
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Have your PI send the facilities manager, Perry Cheung (pcheung@engr.ucr.edu), an email indicating approval for your training
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Complete the following 4 training modules via UC Learning
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Laboratory Safety Fundamentals [previously Laboratory Safety Orientation (Fundamentals) 2013]
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Hazardous Waste Management
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X-Ray Safety
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Compressed Gas Safety
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Review the SEM Policies and Regulations
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Fill out the SEM FAU Authorization Form with PI signature and your departmental MSO or FAO signature
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Deliver a printed copy of your training transcript and signed FAU and authorization forms to facilities manager (MSE 311)
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You will receive an email in a few days with your username and temporary password to reserve time on our Faces scheduling system (Group: ucr_sem)
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Before requesting training, it is important that you review ALL the SEM Training Videos (watch multiple times if necessary) until you're familiar with the entire process. This will ensure that your training will be both effective and efficient.
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Check available 2 hour blocks on Faces and arrange a time with the facilities manager for training
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Reserve a 2 hour block on Faces (1 hour block on Faces for follow-up exam)
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Review ALL the SEM Training Videos (see above) prior to the training (and prior to follow-up exam)
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Meet outside lab manager’s office (MSE 311) on agreed training day and time.
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Once training is completed, you may request key access to the SEM.
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Access to 3rd Floor of MSE
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For undergraduate ENGR users without card access to the 3rd floor of MSE, you will request room access to MSE-SEM by submitting a request to Systems.
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For non ENGR users, you will need to request a proximity card from the facilities manager.
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