SEM: TESCAN Vega3 SBH

Covid-19 Protocols for Renewed Access to Facilities

MSE Fee-For-Service facilities are reopened and will be following the latest campus guidelines on the return to campus website.

Electron Gun	Tungsten heated cathode, 200 V - 30 kV
Vacuum	High Vacuum Mode: < 9 x 10^-3 Pa
Resolution	High Vacuum Mode (SE): 3 nm at 30 kV, 8 nm at 3 kV
Detectors	Secondary Electron (SE) Back Scattered Electron (BSE)
EDS Analytical System	Bruker LN₂-free high-resolution, high-speed 30 mm² SD Detector Energy resolution ≤ 129 eV at Mn-Kα Slew window, detection from boron (5) to californium (98)
Stage	Eucentric Standard: 3-axis motorized X = 45 mm - motorized, Y = 45 mm - motorized, Z = 27 mm manual Rotation = 360° continuous - motorized, Tilt = -90° to +90° - manual
Magnification	3x - 1,000,000x (for 5" image width in Continual Wide Field/Resolution)
Working Modes	Resolution, Depth, Field, Wide Field

Useful SEM Consumables

Vendor	Product #	Description
Ted Pella	16111	Standard SEM Pin Stub Mount, Ø12.7mm x 8mm pin height
Ted Pella	16084-1	PELCO Tabs, Carbon Conductive Tabs, 12mm OD
Ted Pella	16144	Large Ø25.4mm x 9.5mm pin height
Ted Pella	16084-2	PELCO Tabs, Carbon Conductive Tabs, 25mm OD
Ted Pella	16102	Low Profile 45º/90º SEM Mount Ø12.7mm
Ted Pella	16355	45º/90º SEM Mount Ø25mm. Aluminum, grooved edge, 9.5mm pin height.
Ted Pella	16073	Carbon Tape, 8 mm W x 20 m L
Ted Pella	16709	PELCO^® SEM Storage box and holder for up to 18 of 12.7mm pin mounts
Ted Pella	1663-12	SEM Pin Stub Mount Gripper Tweezers, SS, 45° angle, 114mm long, for 12.7mm pin stubs

EDS Analysis Software

ESPRIT Compact Software (free download)

Choose to install the Data Station (with dongle) option
Ignore the error code
Open the program, and click "System", and "Update"
Download, and select the following License File
Restart the program

ESPRIT 2.1 (in MSE 309 only)

Useful Documentation

UCR SEM training and operators manual	UCR MSE SEM Training Notebook rev 3.7 (last updated March 12, 2019)
UCR EDS training and operators manual	UCR MSE EDS Training Notebook rev 1.0 (last updated October 24, 2018)
JEOL SEM guide	JEOL SEM Guide
ESPRIT Compact operators manual	ESPRIT Compact Manual
UCR Sputter Coater training and operators manual	UCR MSE Sputter Coater Training Notebook rev 1.0 (last updated December 12, 2019)
Back Scattered Electron (BSE) Detector training and operators manual	UCR MSE BSE Training Notebook rev 1.0 (last updated February 1, 2023)

SEM Training Videos

SEM Training ver 3. (full playlist)	VI. Beam Intensity	XIII. Column Centering
0. Introduction	VII. Brightness and Contrast	XIV. Stigmation Correction
I. Initiate Software	VIII. Mag	XV. Image Acquisition
II. Sample Preparation	IX. Focusing	XVI. Saving
III. Sample Loading	X. Speed	XVII. Sample Unloading
IV. Turning on HV	XI. Working Distance	XVIII. Cleanup
V. Mode	XII. Image Preparation

EDS Training Videos

EDS Training ver 1. (full playlist)	VI. EDS Configuration	XIII. Choice of HV
0. Introduction	VII. Image Capture	XIV. Object Analysis
I. Sample Preparation	VIII. Spectrum Acquisition	XV. Line Scan
II. Initiate Software	IX. Spectrum Acquisition	XVI. Mapping
III. Sample Properties	X. Spectrum Chart	XVII. Mapping Processing
IV. Microscope	XI. Choice of BI	XVIII. Cleanup
V. Scan Configuration	XII. Choice of Acquire

ESPRIT Compact Part 1: Overview and Multi-point
ESPRIT Compact Part 2: ID
ESPRIT Compact Part 3: HyperMap
ESPRIT Compact Part 4: Line Scans

Sputter Coater Training Video

Access to SEM

Only trained users are allowed to operate the equipment
Trained users are NOT ALLOWED to train anyone else on the equipment
Trained users are NOT ALLOWED to bring in any unauthorized visitors even if the visitors are observing the trained user without prior notification to the lab manager
All visitors MUST complete the following 4 training modules via UC Learning and inform the lab manager prior to entering the lab as an EH&S requirement
- Laboratory Safety Fundamentals
- Hazardous Waste Management
- Radiation Safety For Users of Radiation Producing Machines
- Compressed Gas Safety
E-mail a copy of your visitor's training transcript to facilities manager Perry Cheung (pcheung@engr.ucr.edu)

Training Request for SEM

Have your PI send the facilities manager, Perry Cheung (pcheung@engr.ucr.edu), an email indicating approval for your training
Complete the following 4 training modules via UC Learning
1. Laboratory Safety Fundamentals
2. Hazardous Waste Management
3. Radiation Safety For Users of Radiation Producing Machines
4. Compressed Gas Safety
Review the SEM Policies and Regulations
Fill out the SEM FAU Authorization Form with PI signature and your departmental MSO or FAO signature
Email a copy of your training transcript and signed Authorization Form to facilities manager Perry Cheung (pcheung@engr.ucr.edu)
Send a recent headshot photo of yourself to the facilities manager (a simple JPEG using your phone will suffice)
You will receive an email in a few days with your username and temporary password to reserve time on our Faces scheduling system (Group: ucr_sem)
Before requesting training, it is important that you review ALL the SEM Training Videos (watch multiple times if necessary) until you're familiar with the entire process. This will ensure that your training will be both effective and efficient.
Check available 2 hour blocks on Faces and arrange a time with the facilities manager for training
Reserve a 2 hour block on Faces (1 hour block on Faces for follow-up exam)
Review ALL the SEM Training Videos (see above) prior to the training (and prior to follow-up exam)
Meet outside lab manager’s office (MSE 311) on agreed training day and time.
Once training is completed, you may request key access to the SEM.

Access to 3rd Floor of MSE

For undergraduate ENGR users without card access to the 3rd floor of MSE, you will request room access to MSE-SEM by submitting a request to Systems.
For non ENGR users, you will need to request a proximity card from the facilities manager.

Charges and Billing

All services and instruments are accessible by advanced appointment on first-come-first-serve basis.
An online web-based reservation system should be used for scheduling by registered users, who have the relevant access privileges.
Minimum reservation time on any instrument is a 1/2 hour. There is no limit on the length of reservation. A maximum continuous reservation time may be imposed if the demand becomes significant.
Starting time for each session is the booking time on the FACES system.
Your usage will be billed based on your FACES reservations.
Not recording a session within one hour of concluding the use is subject to 2x the hourly rate penalty charge per incident for each hour not recorded.
If users are found in violation of the scheduling procedure twice within a 3-month period, their access will be revoked for up to 6 months.

Visitors and Guests

All visitors MUST complete the following 4 training modules via UC Learning and inform the lab manager prior to entering the lab as an EH&S requirement
- Laboratory Safety Fundamentals [previously Laboratory Safety Orientation (Fundamentals) 2013]
- Hazardous Waste Management
- Radiation Safety For Users of Radiation Producing Machines
- Compressed Gas Safety
E-mail or deliver printed copy of your visitor's training transcript to facilities manager (MSE 311)

Materials Science and Engineering

SEM: TESCAN Vega3 SBH

Location

SEM Fees

Location

Sputter Coater Fees

Materials Science and Engineering Program